Commodity | Commodity(English) | Molecular Formula | Grade | Specifications | |||||
---|---|---|---|---|---|---|---|---|---|
UPSSS | UPSS | UPS | EL | CP | IN | ||||
Sulfuric Acid | sulfuric acid | H₂SO₄ | ◆ | ◆ | ◆ | ◆ | click here | ||
* In
* CP Chemical purify * EL is equivalent to the U.S. SEMI G1 standard, which controls particulate matter (as required) and more than 10 kinds of l elements, with single l element controlled below 300ppb. * UPS is equivalent to the U.S. SEMI G3 standard, which controls particulate matter (as required) and more than 30 kinds of l elements, with single l element controlled below 1ppb. * UPSS is equivalent to the U.S. SEMI G4 standard, which controls particulate matter (as required) and more than 10 kinds of l elements, with single l element controlled below 0.1ppb. *UPSSS is above the U.S. SEMI G4 standard, which controls particulate matter (as required) and more than 30 kinds of l elements, with single l element controlled below 0.1ppb. |
*Annotation |