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Commodity Commodity(English) Molecular Formula Grade Specifications
UPSSS UPSS UPS EL CP IN
Ammonia ammonia NH₄OH click here
* In
* CP Chemical purify
* EL is equivalent to the U.S. SEMI G1 standard, which controls particulate matter (as required) and more than 10 kinds of l elements, with single l element controlled below 300ppb.
* UPS is equivalent to the U.S. SEMI G3 standard, which controls particulate matter (as required) and more than 30 kinds of l elements, with single l element controlled below 1ppb.
* UPSS is equivalent to the U.S. SEMI G4 standard, which controls particulate matter (as required) and more than 10 kinds of l elements, with single l element controlled below 0.1ppb.
*UPSSS is above the U.S. SEMI G4 standard, which controls particulate matter (as required) and more than 30 kinds of l elements, with single l element controlled below 0.1ppb.
*Annotation